INFICON IC/5 Thin Film Deposition Controller - Manual (Page 228)

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IC/5 Operating Manual
Figure 10-31 Statement 27
Statement 36 monitors the same conditions as Statement 17. Whereas Statement
17 opens the Vent valve, Statement 36 cancels all previous messages, places the
IC/5 into the STOP state and Statement 27 puts up the VENTING- CHAMBER
message.
Figure 10-32 Statement 28
Statement 28 monitors the Chamber at Atmosphere input. It also monitors the
Gauges input to ensure the Gauges are functioning properly before canceling the
“VENTING- CHAMBER” message and displaying the “CHAMBER- VENTED”
message.
Figure 10-33 Statement 29
Statement 29 cancels the “START PUMP-CYCLE”, “UNDER-HIGH- VACUUM”,
“CHAMBER VENTED”, and “VENTING- CHAMBER” messages when either the
pump down cycle and deposition process is aborted, Statement 19, or the system
is not ready for the automatic process cycle, Statement 2.
NOTE: Statements 30 Through 43 Control the Deposition Process and Post
Deposition Process Venting.
Figure 10-34 Statement 30
Statement 30 monitors the Deposition Pressure OK input, makes sure that the IC/5
is in the READY state, the high vacuum valve is open and the instrument is ready
for automatic process control. Once these conditions are met, the electron beam
gun filament is turned on by activating the Filament Interlock On and Filament On
relays. This statement can be true only if these conditions are met and Timer 14
has not expired. The dependence on Timer 14 is so a STOP/ RESET command
sequence on the IC/5 can be allowed without Statements 30, 3 1, and 32 being
evaluated true causing an unwanted START command. Timer 10 is set to allow a