INFICON IC/5 Thin Film Deposition Controller - Manual (Page 245)

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IC/5 Operating Manual
11.3.4.3 RS-232C Communications
RS-232C serial communications is included in the controller as standard
equipment. It is used to remotely control or monitor the IC/5. An industry standard
9-pin D-Sub connector is required for the host computer side connection.
Depending on the computer source, all connections may not be necessary. The
length of the cable is limited to fifty feet according to published standards. The
controller interface operates as DTE (Data Terminal Equipment). Pin assignments
are for the IC/5’s connector.
Table 11-4 RS-232C Pin Connections
Signal Name Pin EIA Name
TX Transmit Data 2 BA
RX Receive Data 3 BB
RTS Request To Send 8 CA
CTS Clear To Send 7 CB
DSR Data Set ready 4 CC
SG Signal Ground 5 AB
(Not Used) 1
DTR Data Terminal Ready 6 CD
GND Shield Ground 9