INFICON IC/5 Thin Film Deposition Controller - Manual (Page 129)

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IC/5 Operating Manual
POST-DEPOSIT
Sets the logic condition to be true at the beginning of the Feed state or the
beginning of the Idle Ramp state. The condition remains true until a START
command is received or until a STOP/RESET sequence is executed.
PROCESS ###
Sets the logic condition to be true when Process # is designated as the Active
Process. The condition remains true until the Process number is changed.
Numeric inputs range from 1 to 50, indicating the respective Process.
PROCESS END ###
Sets the logic condition to be true at the end of the specified process when Idle
is entered. The condition remains true until a START or a STOP/RESET
command is received. Numeric inputs range from 0 to 50, with 1 through 50
indicating the respective Process and 0 indicating all Processes.
RATE <0.1
This condition will evaluate true when the actual deposition rate is less than 0.1
Å/s for more than 5 seconds while in Deposit or Manual. The condition remains
true until the actual deposition rate is greater than 0.1 Å/s for 5 seconds or
more.
RATE RAMP 1
Sets the logic condition to be true at the beginning of Rate Ramp 1. The
condition remains true until the end of Rate Ramp 1. The condition is also
cleared when entering the Manual state, when a STOP/RESET or a
STOP/START sequence is executed.
RATE RAMP 2
Sets the logic condition to be true at the beginning of Rate Ramp 2. The
condition remains true until the end of Rate Ramp 2. The condition is also
cleared when entering the Manual state, when a STOP/RESET or a
STOP/START sequence is executed.
READY
Sets the logic condition to be true as long as the instrument is in the READY
state. The condition remains true until a START command is received.
RISE 1
Sets the logic condition to be true at the start of Rise Time 1. The condition
remains true until the end of the Rise Time 1. The condition is also cleared
when entering the Manual state, when a STOP/RESET or a STOP/START
sequence is executed. Note: This state and SOAK 1 are skipped if the same
material was used in a previous layer and has a non-zero Idle power. The next
layer using this material will immediately proceed to the Rise 2 state.