INFICON IC/5 Thin Film Deposition Controller - Manual (Page 173)

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209 User Message 10
6 Stop Status - Returns the stop status as an ASCII
number, 0 if the system is not in STOP or returns an
ASCII code indicating what caused the stop.
Causes marked with an * have numeric designators
on the front panel which do not return when the SG
06 request is sent. See
Chapter 13 for error
message descriptions.
þ
xx
þ
Response Codes to SG 06 Command.
Stop# Stop Cause
1 SHUTTER DELAY
2 FRONT PANEL
3 TIME POWER
4 MAX. POWER
5 XTAL FAIL*
6 SOURCE CONFLICT
7 SENSOR CONFLICT
8 POWER LOSS
9 SOURCE SWITCH
10 SWITCHER FAIL
11 MAX. POWER < 5%
Table 7-19 Status Command SG
þ
global_status_code
Code# Global Condition Response Format