INFICON IC/5 Thin Film Deposition Controller - Manual (Page 268)

13 - 4
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
ILLEGAL DATE
The month or day entry is invalid. Month numbers must be in the 01 to 12
range; day numbers must be in the correct range for the month specified.
ILLEGAL INPUT - VALUE TOO LARGE
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameter being defined. Press CLEAR to delete the
value and enter again.
ILLEGAL INPUT - VALUE TOO SMALL
Parameter entry is out of range. Allowable values will vary according to your
unit configuration or the parameter being defined. Press CLEAR to delete the
value and enter again.
ILLEGAL LOCK CODE
The correct lock code is necessary to unlock parameters.
ILLEGAL SENSOR TYPE
Sensor type may be only 1, 2, or 6.
ILLEGAL TIME
Time is invalid. Numbers designating hours must be in the 00 to 23 range;
numbers designating minutes must be in the 00 to 59 range.
INPUT IN USE
The input line in question has already been reserved for use.
INVALID EQUATION
Strings must have connectors and required numerics before exiting the Logic
Statement.
I/O EQUATIONS LOCKED
The strings comprising the I/O equations cannot be accessed while the
program or I/O lock code is set.
I/O LOCK
The instrument has been placed in I/O lock. This prohibits entering I/O or
Source/Sensor parameters from the front panel unless the I/O Lock Code is
known.
LAYER UNDEFINED
The “Layer to Start” defined in Utility Set Up must correspond to a defined
layer in the active process.
MATERIAL IN USE
A material referenced in any layer cannot be deleted.
MATERIAL UNDEFINED
A material must be previously defined in the Material Directory.