INFICON IC/5 Thin Film Deposition Controller User Manual
Page 195
8 - 7
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
XTAL SHUTTER OUTPUT. . . . . . . . 0 to 38
This parameter designates which of the 38 outputs is to be used to activate the
Crystal Shutter for Sensor 1. Values range from 0 to 38. Values 1 through 38
correspond to the appropriate output. Value 0 indicates that a shutter is not
used. The default value is 0. If a value other than 0 is entered then the relay
chosen as the Crystal Shutter output relay is designated as such on the I/O
Map Display. The logic condition is set to be true as long as the Layer
containing Sensor 1 is in CONTROL DELAY, SHUTTER DELAY, DEPOSIT,
MANUAL, or in the Sample period of the RateWatcher function. The condition
remains true until the end of DEPOSIT, until a STOP command is received, or
during the Hold period of the RateWatcher function.
XTAL SHUTTER TYPE . . . . . . . . . . 0/1
This parameter designates the normal state of the relay contact closure for the
Crystal Shutter relay. Permissible values are 0 and 1. 0 indicates an Normally
Open relay, 1 indicates a Normally Closed relay. The default value is 0 for
Normally Open.
Z-RATIO . . . . . . . . . . . . . . . . . . . . . . 0/1
This parameter designates the method in which the Z-ratio value will be
obtained for use in computing thickness with this sensor. Permissible values
are 0 and 1. 0 indicates that the Auto Z calculation feature of the system is
used. Auto Z cannot be enabled on a crystal which is “unable to Auto Z.” Refer
to
for details on why a crystal may be “unable to
Auto Z.” 1 indicates that the Z-ratio established in Material Definition is used.
The default value is 1 for the Material Z-ratio.
SENSOR Z . . . . . . . . . . . . . . . . . . . . (display only)
The value found here is the most recently calculated Auto Z-ratio associated
with this sensor. It is entered by the instrument automatically. When the Z-ratio
parameter (above) is set to 0, this value is updated once every second. In the
event of an Auto Z failure, the most recently calculated Z value is entered and
held constant until the crystal is replaced.
RECORDER OUTPUT
This parameter designates which of the DAC outputs is to be used as a
Sensor’s recorder output. Values range from 0 to 6, with 0 indicating there is no
DAC identified with this sensor. Values 1 through 6 correspond to the 6 DAC
outputs on the back of the instrument.