INFICON IC/5 Thin Film Deposition Controller - Manual (Page 25)

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IC/5 Operating Manual
Feed Ramps . . . . . . . . . . . . . . . . . . . 1 per material
Feed Power . . . . . . . . . . . . . . . . 0.0 to 99.9%
Feed Ramp Time . . . . . . . . . . . . 00:00 to 99:59 min:sec
Feed Time. . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Idle Ramps . . . . . . . . . . . . . . . . . . . . 1 per material
Idle Power. . . . . . . . . . . . . . . . . . 0.0 to 99.9%
Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Aggregate Rate . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/sec
Aggregate Multiplier . . . . . . . . . . . . . Yes/No
Final Thickness . . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Thickness Limit. . . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Time Limit . . . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Co-deposition
Cal Thick. . . . . . . . . . . . . . . . . . . uncal, 0.000 to 99.99kÅ
Ratio Control. . . . . . . . . . . . . . . . 0 to 99%
RateWatcher® . . . . . . . . . . . . . . . . . Sample and Hold Feature
RateWatch Time . . . . . . . . . . . . . 00:00 to 99:59 min:sec
RateWatch . . . . . . . . . . . . . . . . . Accuracy 1 to 99%
Rate Ramps . . . . . . . . . . . . . . . . . . . 2 per layer
New Rate . . . . . . . . . . . . . . . . . . 0 to 999 Å/sec
Start Ramp . . . . . . . . . . . . . . . . . 0 to 999.9 kÅ
Ramp Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
Crucible Selection . . . . . . . . . . . . . . 1 to 64, each source