INFICON IC/5 Thin Film Deposition Controller - Manual (Page 257)

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IC/5 Operating Manual
12.6 AutoTuning
The AutoTune feature of the IC/5 is used to automatically characterize the
response of a system. AutoTune examines the rate change response after
executing step changes in power. Control parameters are calculated for algorithms
designed for either slow-responding systems or fast-responding systems, with PID
parameters determined for slow systems and a process gain coefficient
determined for fast sources.
Figure 12-2 Display Tree for AutoTune
There are two subsets of AutoTune. A shortened version called "Quick Tune",
calculates the required values from a fixed change in source power. The "Complete
Tune" process first incorporates the Quick Tune procedure and then refines the
parameter values by operating at a set of rates established about the desired
operating point.
Initiate the AutoTune operation by selecting the AUTOTUNE function key (F5) in
the Source Maintenance display while in the READY state. This will invoke the
AutoTune Parameters display; upon entry, the cursor will be found at the last
referenced parameter.
Edit an AutoTune parameter by positioning the box cursor at the desired parameter
value and then using the data entry keys to input a new parameter value. By using
the function keys you may start the manual state of AutoTune or you may return to
the Source Maintenance Display.
PROGRAM
MAINTENANCE/DIAGNOSTICS
SOURCE MAINTENANCE
AUTOTUNE PARAMETERS
AUTOTUNE MANUAL
AUTOTUNE TUNING