INFICON IC/5 Thin Film Deposition Controller - Manual (Page 23)

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IC/5 Operating Manual
1.4 IC/5 Specifications
1.4.1 Measurement
Crystal Frequency . . . . . . . . . . . . . . 6.0 MHz (new crystal) to 4.5 MHz
Internal Precision . . . . . . . . . . . . . . . ± 0.004657 Hz over 100 ms sample for
fundamental and anharmonic frequencies
Thickness & Rate Resolution . . . . . . 0.00577 Å (new crystal);
0.01016 Å (crystal @ 4.5 MHz) over
100 ms sample for material density = 1.0,
Z-ratio = 1.0
Thickness Accuracy . . . . . . . . . . . . . 0.5% typical, (dependent on process
conditions, especially sensor location,
material stress, temperature and density)
Frequency Accuracy. . . . . . . . . . . . . ± 2 ppm 0-50 °C
Measurement Frequency . . . . . . . . . 10 Hz
Measurement Technique . . . . . . . . . ModeLock with Auto-Z
User Interface. . . . . . . . . . . . . . . . . . CRT and limited membrane keypad. All
parameters accessible through computer
communications. Multiple message areas for
indication of states and detailed indication of
abnormal and stop conditions.
1.4.2 Screens and Hierarchy
Navigation
1) Traditional. . . . . . . . . . . . . . . . Six soft keys
2) "Windows" influence. . . . . . . . X-tree like function with 4 levels of hide/show.
Structure . . . . . . . . . . . . . . . . . . . . . . Separate screens dedicated to
1) Materials, 2) Layers, 3) Logic,
4) Sensors, 5) Sources, 6) Utility,
7) Maintenance, 8) Communications,
9) Operation