INFICON IC/5 Thin Film Deposition Controller - Manual (Page 208)

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IC/5 Operating Manual
Figure 10-1 The Essential Advantage of Multi-Point Deposition Sensing
10.1.1 Instrument Parameters and Corrections for
Multiple Sensor Operation
AGGREGATE RATE
The Aggregate Rate calculation is based on:
 The rate information acquired by each sensor in use.
 A weighting factor that reflects the relative importance of each sensor's
information.
 A sensor tooling factor that corrects for any relative difference in flux
distribution reaching the sensors.
The aggregate rate is calculated from a combination of the above information
into a weighted average.