INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
Generally, install the sensor as far as possible from the evaporation source (a
minimum of 10" [25.4 cm] is recommended) while still being in a position to
accumulate thickness at a rate proportional to accumulation on the substrate.
shows proper and improper methods of installing sensors.
Figure 11-2 Sensor Installation Guidelines
To guard against spattering, use a source shutter or crystal shutter to shield the
sensor during the initial soak periods. If the crystal is hit with even a minute particle
of molten material, it may be damaged and stop oscillating. Even in cases when it
does not completely stop oscillating, it may become unstable. Follow these
precautions:
Mount the sensor to something rigid and fixed in the chamber. Do not rely on
the water tubes to provide support.
Plan the installation to insure there are no obstructions blocking the path
between the Sensor and the Source. Be certain to consider rotating or moving
fixtures.
Install sensors so their central axis (an imaginary line drawn normal to the
center of the crystal’s face) is aimed directly at the virtual source being
monitored.
Be sure there is easy access for the exchange of crystals.
For systems employing simultaneous source evaporation (co-deposition), try to
locate the sensors so the evaporant from each source is flowing to only one
sensor. It is not generally possible to do this without special shielding or
optional “material directors”.
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