4 process description, 1 defining a process – INFICON IC/5 Thin Film Deposition Controller User Manual
Page 74
3 - 22
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
3.4 Process Description
The IC/5 allows the user to control deposition of a sequential series of single layers
or two co-deposited layers of materials. This is done by defining and executing a
process.
3.4.1 Defining a Process
The following procedure is used to define a process. (All steps do not necessarily
have to be followed in the given order.)
1
Make sure the instrument is in READY.
Some configuration and process parameters can be changed only while the
instrument is in READY. Therefore, before setting parameters, make sure
READY appears as the state on the OPERATE display. If it does not, press
STOP then RESET.
2
Configure the sensors.
Configuring the sensors involves designating whether the sensor is a single,
dual or CrystalSix sensor, and what output relays are connected to the sensor
shutter and crystal switcher, if any. Also, the Auto Z feature is activated or
deactivated during sensor configuration. These parameters are on the
SENSOR display of the SOURCE/SENSOR display. See
for a
detailed description for programming these parameters. Also see
for details on crystal switching.
3
Configure the sources.
Configuring the sources involves selecting the digital-to-analog voltage
converter (DAC) output, the output voltage range and polarity, and selecting the
output relay for the source shutter. Also, if a source has more than one crucible,
this is set up in the source configuration. The source parameters are
programmed on the SOURCE screen of the SOURCE/SENSOR display. See
for a detailed description for programming these parameters. Also
see
for details on crucible selection.
4
Define materials.
To define materials, the MATERIAL displays are used. Each distinct material
used in the process must be defined. If the same material is going to be used
more than once in the process, it needs to be defined only once. Final thickness
and rate parameters are determined by the layer definition. The material
definition includes density, Z-ratio, tooling, and soak power characteristics.
Control loop characteristics also relate to the material. Also, a specific sensor
and source are associated with each material. See
for a detailed
description for programming these parameters.