INFICON IC/5 Thin Film Deposition Controller - Manual (Page 95)

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IC/5 Operating Manual
Chapter 4
Material Set Up
4.1 Material Set Up Overview
The IC/5 can store the definition parameters for up to 24 materials. Each layer in a
Process references one of these materials by its directory number, ranging from 1
to 24. Any material that is to be used must be defined.
Materials are defined by referencing the internal Material Library (see Figure 4-1 )
and by completing a series of parameter entries at the front panel.
Figure 4-1 Display Tree for Material Set Up
Material Set Up is initiated by selecting the MATERIAL Directory (F1) key in the
Program display. This will invoke the Material Directory (see
Figure 4-2 ). Upon
entry to the Material Directory, the cursor will be found at the last referenced
material.
4.2 Material Definition
Material definition is initiated by selecting the MATERIAL (F5) panel in the Material
Directory. If the cursor is placed at a previously defined material, the definition
displays for that material will be entered. If the cursor is placed at an unassigned
material, the Material Library will be entered to select from one of more than two
hundred cataloged materials.
PROGRAM
MATERIAL DIRECTORY
MATERIAL
MATERIAL LIBRARY