INFICON IC/5 Thin Film Deposition Controller - Manual (Page 255)

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IC/5 Operating Manual
12.5.3 Cross Talk Calibration CALIBRATE display
Upon entering this display the thickness values are zeroed and the aggregate rate
will be controlled to the desired rate. Thickness will accumulate on each of the
sensors set for calibrate YES. Calibration will continue until a 300 Hz frequency
shift has taken place on the sensors selected in the Material Set-Up display (i.e.,
the sensors used to calculate the Aggregate Rate). The instrument will stay in the
automatic calibration mode for a minimum of 1 minute. The estimated time to
complete calibration is displayed in the lower left hand side message area.
If the desired 300 Hz frequency shift has not taken place within 15 minutes,
automatic calibration will time out and an error message will be given. When
automatic calibration is completed the IC/5 will enter a RAMP Power Down state in
which the source control power is ramped to Zero over the time period designated
by this material's Idle Ramp Time.
12.5.3.1 Function Key Selection Choices for
Cross Talk Calibration Calibrate
12.5.4 Cross Talk Calibration SELECT display
After the RAMP down state the IC/5 enters the SELECT display, from which the
user can accept or reject the calibration thickness values, as desired. If the values
are accepted they are stored on page 3 of the Material Set-Up display.
Key Function Description
F6 STOP CALIBRATION Press this key to leave the CALIBRATE display and
return to the SETUP display.