INFICON IC/5 Thin Film Deposition Controller - Manual (Page 217)

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IC/5 Operating Manual
WARNING - Risk Of Electric Shock
This example of automated vacuum system and
deposition control uses an electron beam gun. The
power to this electron beam gun is remotely activated in
these example logic statements. Extreme care must be
used whenever working with the high voltage present
when using an electron beam gun. Be certain you
understand completely how to operate the IC/5 and how
the logic functions work before automating your vacuum
system.
NOTE: In this example there are a number of conditions which must be satisfied
in order for the electron beam gun high voltage and filament voltage to be
turned on. One of these conditions is that the IC/5 must be in the READY
state. When an Abort input is activated the electron beam gun high voltage
and filament voltage are turned off. Therefore, if an Abort input is activated
after the deposition is started the electron beam gun high voltage and
filament voltage will not be turned on automatically unless the deposition
process is restarted from the READY state.
Since the logic statements are evaluated once every 100 milliseconds, timers are
used in some cases to “latch” a condition or series of conditions. This is done by
making a Statement conditional on the expiration state of a particular timer.
Consideration must be given as to when this timer should be canceled. Other
timers in this example are used as delays between the occurrence of an event and
the execution of an action.
WARNING
When switching from the manually operated to the
automatically operated states, be careful of the status of
the high vacuum, roughing, foreline, and vent valves.
For this example, the foreline valve should be open and
all other valves closed when switching between manual
and automatic control.