INFICON IC/5 Thin Film Deposition Controller - Manual (Page 260)

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IC/5 Operating Manual
12.6.3 AutoTune Tuning Display and
AutoTune Description
The AutoTune Tuning display is entered from the AutoTune Manual display by
selecting START TUNING (F5).
AutoTune tuning is executed automatically by the instrument. Operator intervention
is not required.
STOP the tuning process by pressing F6 (EXIT AUTOTUNE).
Figure 12-5 AutoTune Tuning Display
The instrument goes through the following algorithm when AutoTuning:
The first portion of Tuning is the Speed Test. The Speed Test calculates how quickly
the system reacts to an instantaneous increase in source power level. The results
of the Speed Test determine whether the system is fast or slow. Consequently, this
designation of fast or slow determines what action is to follow.
For Quick Tune, the increment in power level is a pre-determined percentage of the
power, while for a Complete Tune the increment in power level is calculated to
obtain a specific rate increase.
If Quick Tune is chosen, the instrument will begin the AutoTune procedure by first
recognizing an initial power setting. This initial power setting is the power level the
operator adjusts to while in the Manual state of AutoTune. Next, the instrument will
increase the power level to a value 5% greater than the initial level. If the rate of
deposition exceeds the Maximum Rate value during this transition, the power level
is returned to the initial power setting and the instrument will increase the power
level to a value of 2.5% greater than the initial level.
Again, if the Maximum Rate value is exceeded, the power level is returned to the
initial power setting and the instrument will increase the power level to a value of
1.25% greater than the initial level. If the Maximum Rate is exceeded this final time
a Quick Tune Failure message will appear and the control loop parameters must
be determined manually. If the rate does not exceed the Maximum Rate value