INFICON IC/5 Thin Film Deposition Controller - Manual (Page 94)

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IC/5 Operating Manual
If two layers are co-deposited, the first layer to have a source shutter close will be
data-logged first.
The ability to turn ON/OFF datalogging and where to output the datalog data set is
determined by a programmable parameter located in the Remote Communications
display. The CRYSTAL USE HISTORY data is an optional subset of the datalog
string. A second parameter located in the Remote Communications display is used
to determine if the CRYSTAL USE HISTORY is to be output. Additionally, the
datalog string format is selectable between a page format and a comma delimited
format. The comma delimited format is actually comma-and-quote delimited
intended for file importation into a spreadsheet program. When a spreadsheet
program imports a file having the comma delimited format data groups that are
strictly numbers become value entries, data groups surrounded by quotes are
stored as labels. For the page format, only those sensors which are used in a
particular Material for a particular Layer will be datalogged. For the comma
delimited format, all the data fields are returned for all the sensors and crystals. If
a sensor is not used during the deposition, the data field will contain a zero.
Outputting the Datalog Data Set to multiple outputs at the same time (for example,
Save to diskette and Output to Remote Comm at the same time) is not allowed.