INFICON IC/5 Thin Film Deposition Controller - Manual (Page 128)

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IC/5 Operating Manual
LAST LAYER
Sets the logic condition to be true at the beginning of the Last Layer defined for
the active process. The condition remains true until the last Layer enters the
IDLE state.
LAYER ###
Sets the logic condition to be true at the beginning of Layer ### (when Layer
### is in the READY state at the beginning of a Process or when STARTed
during a Process). The condition remains true until the layer is no longer active.
Numeric inputs range from 1 to the maximum number of defined layers.
LAYER END ###
Sets the logic condition to be true when the specified Layer enters the IDLE
state. The condition remains true until a START or a STOP/RESET command
is received. Numeric inputs range from 0 to the maximum number of defined
layers, with 0 indicating all Layers.
MANUAL
Sets the logic condition to be true when the Manual state is entered. The
condition remains true until leaving the Manual state, when a STOP/RESET or
a STOP/START sequence is executed.
MATERIAL ##
Sets the logic condition to be true whenever a Layer containing Material ## is
in the READY state at the beginning of a Process or when it is STARTed during
a Process. The condition remains true until the material is no longer active and
can stay true across layers if the same material is used in 2 or more
consecutive layers. Numeric inputs range from 1 to the maximum number of
defined materials.
MATERIAL END ##
Sets the logic condition to be true when the Layer for the specified Material
enters the IDLE state. The condition remains true until a START or a
STOP/RESET command is received. Numeric inputs range from 0 to the
maximum number of defined materials, with 0 indicating all materials.
MAX POWER
Sets the logic condition to be true as long as any source is at Maximum Power.
The condition remains true until every source is less than Maximum Power.
PRE-DEPOSIT
Sets the logic condition to be true at the beginning of the Ready, Source Switch,
Shutter Delay, Rise 1, Rise 2, Soak 1, or Soak 2 state. The condition remains
true until the Deposit, Manual, or any Post-Deposit state is entered.