INFICON IC/5 Thin Film Deposition Controller - Manual (Page 259)

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IC/5 Operating Manual
CONTROL LOOP
This is a read-only parameter that indicates the type of control loop specified
during material definition. A 0 indicates the Non-PID control loop is used. A 1
indicates a PI control loop is used, and a 2 indicates a PID control loop is being
used. See
section 4.3 on page 4-5 and section 2.1.7 on page 2-11 for more
information about the control loop.
PROCESS GAIN
This is a read-only parameter that represents the rate of change of % source
power for a given rate deviation.
PRIMARY TIME CONSTANT
This is a read-only parameter that represents the source's time constant. It is
valid only for a PI or PID control loop.
SYSTEM DEAD TIME
This is a read-only parameter that represents the source's lag time. It is valid
only for a PI or PID control loop.
12.6.2 AutoTune Manual Display
The AutoTune Manual display is entered from the AutoTune Parameters display by
selecting START AUTOTUNE (F6).
The AutoTune Manual display is similar to the general Operate display with the
exception that Thickness and Process information will be absent. The AutoTune
Manual display automatically places the instrument into the MANUAL state. Just
like the normal MANUAL state, the power level can be adjusted via the Hand-Held
Controller and the source shutter relay is active.
Figure 12-4 AutoTune Manual Display