INFICON IC/5 Thin Film Deposition Controller - Manual (Page 278)

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IC/5 Operating Manual
5. all keys on the front panel
fail to function a. instrument is "locked" up a. turn power to OFF or to
STBY, then to ON, see item
2 above
6. control voltage output
does not function properly a. DAC board damaged
from applying voltage to the
control voltage output a. ensure cable connection
to the DAC board does not
have a potential across the
contacts, contact INFICON
service department
b. reversed polarity of
control voltage relative to
that accepted by the source
power supply b. verify source output
polarity of the DAC and the
required input polarity of the
source power supply, refer
to the instruction manual to
reconfigure the instrument if
necessary
c. improper control cable
fabrication c.check for correct cable
wiring in the appropriate
section of the manual
7. CRT or LCD display dull
or blank a. brightness/contrast
adjustment required a. refer to manual for
location of adjustment
potentiometer, adjust as
desired
b. LCD or CRT/power
supply problem b. contact INFICON service
department
8. poor rate control a. control loop parameters
improperly selected a. refer to the instruction
manual section on tuning
control loop parameters
b. electron beam sweep
frequency "beating" with the
instrument's measurement
frequency b. adjust the sweep
frequency so it is not a
multiple of the instrument's
measurement frequency
Table 13-1 Troubleshooting the Instrument
SYMPTOM CAUSE REMEDY