2 source/crucible selection, For d – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
3.6.2 Source/Crucible Selection
The IC/5 can control a source with up to 64 crucibles, through up to six binary
encoded relays. This is configured by setting the Number Of Crucibles, Crucible
Outputs, Turret Feedback, Turret Input, and Turret Delay parameters on the
SOURCE display of the SOURCE/SENSOR Directory. (See
for details on programming the parameters associated with source/crucible
selection.)
To define which crucible to use for a layer, set the “crucible” parameter on the
PROCESS display. When the layer is started, if the current crucible position is
different from the one requested, the system’s turret controller will move into
position. This will be signified on the OPERATE screen by the state indicator
SOURCE SWITCH. The layer sequencing will continue on to RISE 1 after either
the turret delay time expires or an input indicates the turret is in position, depending
on which option is chosen. The specific method used is determined by the
parameter Turret Feedback on the SOURCE screen.
NOTE: If the source has been idling at a nonzero power when the START is
initiated, the power will be dropped to zero before the crucible is changed.
3.6.2.1 Example: Programming Turret Source Crucible Selection
Interfacing a turret source controller to the IC/5 requires both hardware
connections to the turret controller and properly defining certain instrument
parameters.
Proceed to the SOURCE/SENSOR Directory (see
) and
choose the source that is going to be defined as the turret source. This is
accomplished by Editing the chosen source as follows (see
):
1
Designate the Number of Crucibles; for example, 4.
2
Select the Crucible Output. This defines the number of the first relay that
encodes the crucible number selected by the active layer. Relays are defined
sequentially with the first relay containing the least significant bit (LSB). The
greater the number of crucibles selected, the greater the number of relays
required. The number required is based on binary encoding (actual coding is
binary -1, with 00 representing position 1 and 11 representing position 4). Any
unused sequence of relays may be used if it is long enough to provide sufficient
selections.