Chapter 9 utility set-up, 1 utility set-up overview, Chapter 9 – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
Chapter 9
Utility Set-Up
9.1 Utility Set-Up Overview
The IC/5 provides the capability to modify a series of top level parameters that
define the controller’s method of handling system level activities. Some of the
parameters are automatically incremented by the instrument.
Figure 9-1 Display Tree For Utility Set-Up
Initiate Utility Set-Up by selecting the F5 key (UTILITY) in the Program display. This
will invoke the Utility Display (see
). Upon entry, the cursor will be found
at the last referenced utility parameter. The parameters are contained on two
display pages.
Figure 9-2 Utility Display (Page 1)
PROGRAM
UTILITY
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