INFICON IC/5 Thin Film Deposition Controller User Manual
Ic/5, Thin film deposition controller
Advertising
Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Introduction and Specifications
- 1.1 Introduction
- 1.2 Instrument Safety
- 1.3 How To Contact Customer Support
- 1.4 IC/5 Specifications
- 1.4.1 Measurement
- 1.4.2 Screens and Hierarchy
- 1.4.3 SetUp Parameters
- 1.4.4 Display
- 1.4.5 Source / Recorder Outputs
- 1.4.6 Logic Processing
- 1.4.7 Relays / Inputs
- 1.4.8 Remote Communications
- 1.4.9 Accessories
- 1.4.10 Power
- 1.4.11 Operating Environment
- 1.4.12 Storage Temperature
- 1.4.13 Warm Up Period
- 1.4.14 Size
- 1.4.15 Connector Clearance Requirements
- 1.4.16 Weight
- 1.4.17 Cleaning
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial PowerOn Verification
- Chapter 2 Measurement and Control Theory
- Chapter 3 Operation
- 3.1 Front Panel Controls
- 3.2 Rear Panel Interfaces
- 3.3 Displays
- 3.4 Process Description
- 3.5 State Descriptions
- 3.6 Special Features
- Chapter 4 Material Set Up
- Chapter 5 Process Set-Up
- Chapter 6 I/O Logic Statement Set-Up
- Chapter 7 Remote Communications
- 7.1 Remote Communication Configuration Overview
- 7.2 Remote Communication Parameters
- 7.3 Error Messages in Remote Communications Configuration
- 7.4 Remote Communications Overview
- 7.5 Physical Connections
- 7.6 Message Protocols
- 7.7 INFICON Standard Communication Commands
- 7.7.1 ECHO Command
- 7.7.2 HELLO Command
- 7.7.3 Query Commands
- 7.7.3.1 Query Material Parameters
- 7.7.3.2 Query Process Parameters
- 7.7.3.3 Query Utility Parameters
- 7.7.3.4 Query Sensor Parameters
- 7.7.3.5 Query Source Parameters
- 7.7.3.6 Query Output Types
- 7.7.3.7 Query Logic Statements
- 7.7.3.8 Query Output Name
- 7.7.3.9 Query Input Name
- 7.7.3.10 Query User Messages
- 7.7.4 UPDATE Commands
- 7.7.4.1 Update Material Parameters
- 7.7.4.2 Update Process Parameters
- 7.7.4.3 Update Utility Parameters
- 7.7.4.4 Update Sensor Parameters
- 7.7.4.5 Update Source Parameters
- 7.7.4.6 Update Output Types
- 7.7.4.7 Update Logic Statements
- 7.7.4.8 Update Output Name
- 7.7.4.9 Update Input Name
- 7.7.4.10 Update User Message
- 7.7.5 STATUS Commands
- 7.7.6 REMOTE Commands
- 7.7.7 Negative Response Error Codes
- 7.8 Sample INFICON Messages and Host Programs
- Chapter 8 Source/Sensor Set-Up
- Chapter 9 Utility Set-Up
- Chapter 10 Applications
- Chapter 11 Installation and Interfaces
- Chapter 12 Calibration Procedures
- 12.1 Importance of Density, Tooling and Zratio
- 12.2 Determining Density
- 12.3 Determining Tooling
- 12.4 Laboratory Determination of Zratio
- 12.5 Determining Cross Talk Calibration For CoDeposition
- 12.6 AutoTuning
- Chapter 13 Troubleshooting, Status and Error Messages
- Appendix A Material Table
- Index