INFICON IC/5 Thin Film Deposition Controller User Manual
Page 161
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IP
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23
7A
E
IC/5 Operating Manual
11
Quality
12
Stability
13
Maximum Power
14
Soak Power 1
15
Rise Time 1
16
Soak Time 1
17
Soak Power 2
18
Rise Time 2
19
Soak Time 2
20
Auto Soak 2 Value is upper or lower case YES or NO
21
Delay Option
22
Control Delay
23
Feed Power
24
Feed Ramp Time
25
Feed Time
26
Idle Power
27
Idle Ramp Time
28
Sensor 1 Option
29
Sensor 2 Option
30
Sensor 3 Option
31
Sensor 4 Option
32
Sensor 5 Option
33
Sensor 6 Option
34
Sensor 7 Option
35
Sensor 8 Option
36
Sensor 1 Weight
37
Sensor 2 Weight
38
Sensor 3 Weight
39
Sensor 4 Weight
40
Sensor 5 Weight
41
Sensor 6 Weight
42
Sensor 7 Weight
43
Sensor 8 Weight
44
Sensor 1 Tooling
45
Sensor 2 Tooling
46
Sensor 3 Tooling
47
Sensor 4 Tooling
48
Sensor 5 Tooling
Table 7-12 Update Material Parameters (continued)
param# Material
Parameter
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