INFICON IC/5 Thin Film Deposition Controller - Manual (Page 289)

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IC/5 Operating Manual
13.3.3 Bakeable Sensor
For the Bakeable sensor, the procedure is the same as the regular crystal except
that you must first unlock the cam assembly by flipping it up. Once the crystal has
been replaced, place a flat edge of the holder flush with the cam mechanism and
lock it in place with the cam. See
Figure 13-2 .
Figure 13-2 Bakeable Crystal Sensor