INFICON IC/5 Thin Film Deposition Controller - Manual (Page 216)

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IC/5 Operating Manual
10.3.1.6 Temperature Sensor
This sensor provides a contact closure if the sensor's temperature exceeds a
specific value. The Temperature Sensor is mounted to the bottom of the diffusion
pump and is used to indicate when the diffusion pump has reached operating
temperature. This contact closure provides the DP-IS-ON input.
10.3.1.7 Lamps
A lamp is used for the Alarm indication. Power to this lamp is applied with closure
of the ALARM relay. This maybe an audible alarm if desired.
10.3.2 I/O Set-Up
The IC/5 logic statements in this example make use of various inputs from gauges,
valves, vacuum system panel controls and a series of switches to control the
operation of valves, shutters, power to the electron beam gun and an alarm. The
system configuration is such that automatic operation of the pump down and
deposition process cycle is controlled with the series of momentary switches
labeled EVAC Cham, ALARM ANSW, ABORT, and VENT. (See
Figure 10-2 ) The
STOP, START, and RESET switches on the IC/5 front panel are not used unless an
interruption of the deposition process only is desired. The ABORT switch is used if
an interruption of the pump down cycle and an interruption of the deposition
process is desired. Whenever the control system requires operator attention the
ALARM relay is set. Whenever the ALARM relay is set, the ALARM ANSW button
must be pressed to indicate the situation has been resolved, otherwise further
automatic processing is not allowed.
The ALARM relay is set whenever any one of four conditions occurs. These are:
 When all the conditions required for the system to operate under automatic
control are realized.
 Whenever there is an Abort input received.
 Whenever the IC/5 is in the STOP state.
 When the pump down, deposition process cycle has completed and the
vacuum system is at atmospheric pressure.
Once the Alarm relay is set, further automatic processing cannot proceed unless
the Alarm Answered input is activated.