INFICON IC/5 Thin Film Deposition Controller - Manual (Page 83)

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IC/5 Operating Manual
12. RATE RAMP TIME 2 Rate control, desired rate
changing. [New Rate 2, Start Ramp
2, Ramp Time 2] Active Active
13. RATEWATCHER
(SAMPLE)
Rate control. [RateWatch
Accuracy] Active Active
14. RATEWATCHER
(HOLD)
Constant power, based on last
sample’s average power.
[RateWatch Time] Active Inactive
15. MANUAL Source power controlled by
hand-held controller. Active Active
16. TIME-POWER Crystal failed; source maintained at
average control power prior to
crystal failure. [Time Pwr Y] Active Active
NOTE: 17 through 20 are Post-Deposit states.
17. FEED RAMP Source changing to Feed Power.
[Feed Power, Feed Ramp Time] Inactive Inactive
18. FEED Source maintained at Feed Power
level. [Feed Time] Inactive Inactive
19. IDLE RAMP Source changing to Idle Power.
[Idle Ramp Time, Idle Power] Inactive Inactive
20a.IDLE POWER (=0%) Source maintained at zero power;
will accept a START command. Inactive Inactive
20b.IDLE POWER (>0%) Source resting at Idle Power; will
accept a START command. Inactive Inactive
21. STOP Source output set to zero power.
The display is frozen at the last rate
and thickness values; will not
accept a START or RESET
command. Inactive Inactive
NOTE: In the STOP state the instrument will accept a START
provided a Crystal Failure has not occurred for the sensors
used in the layer being started.
Table 3-3 State Descriptions (continued)
STATE CONDITION RELAY CONTACT
STATUS
NOTE: 1 through 7 are Pre-Deposit states.
Source
Shutter Sensor
Shutter