5 special layer parameter features, 1 skip deposit, 2 rate ramp trigger of final thickness – INFICON IC/5 Thin Film Deposition Controller User Manual

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IC/5 Operating Manual

NO MATERIAL DEFINED

Materials must be defined to be used in a Process Layer.

NOT ENOUGH LAYERS

This message is displayed if the number of layers to copy combined with the
number of layers already programmed into the IC/5 will exceed the capacity of
the instrument. The total capacity of the IC/5 is 250 layers.

RAMP 1 MORE THAN 2

Start Ramp 1 Thickness value must be less than Start Ramp 2 value.

RAMP 2 LESS THAN 1

Start Ramp 2 Thickness value must be greater than Start Ramp 1 value.

2 TAGS ALREADY SET

During layer editing this message indicates an attempt to Tag a layer after the
user has already tagged two layers.

5.5 Special Layer Parameter Features

5.5.1 Skip Deposit

If the Rate parameter is set to 0.0Å/s or the Final Thickness is set to 0.000 kÅ, the
instrument will skip the DEPOSIT State. State processing will go directly to the first
programmed post-Deposit state from the last pre-Deposit state. Also, if the Rate
parameter is set to zero during deposit, the Final Thickness will be triggered.

5.5.2 Rate Ramp Trigger of Final Thickness

If either of the rate ramps is programmed for zero New Rate and a non-zero Start
Ramp, the Final Thickness will be triggered upon completion of the Rate Ramp.

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