INFICON IC/5 Thin Film Deposition Controller User Manual
Page 301
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IC/5 Operating Manual
50
Co
8.900
0.343
Cobalt
51
CoO
6.440
0.412
Cobalt Oxide
52
Cr
7.200
0.305
Chromium
53
Cr
2
O
3
5.210
*1.000
Chromium (III) Oxide
54
Cr
3
C
2
6.680
*1.000
Chromium Carbide
55
CrB
6.170
*1.000
Chromium Boride
56
Cs
1.870
*1.000
Cesium
57
Cs
2
SO
4
4.243
1.212
Cesium Sulfate
58
CsBr
4.456
1.410
Cesium Bromide
59
CsCI
3.988
1.399
Cesium Chloride
60
CsI
4.516
1.542
Cesium Iodide
61
Cu
8.930
0.437
Copper
62
Cu
2
O
6.000
*1.000
Copper Oxide
63
Cu
2
S
5.600
0.690
Copper (I) Sulfide (Alpha)
64
Cu
2
S
5.800
0.670
Copper (I) Sulfide (Beta)
65
CuS
4.600
0.820
Copper (II) Sulfide
66
Dy
8.550
0.600
Dysprosium
67
DY
2
O
3
7.810
*1.000
Dysprosium Oxide
68
Er
9.050
0.740
Erbium
69
Er
2
O
3
8.640
*1.000
Erbium Oxide
70
Eu
5.260
*1.000
Europium
71
EuF
2
6.500
*1.000
Europium Fluoride
72
Fe
7.860
0.349
Iron
73
Fe
2
O
3
5.240
*1.000
Iron Oxide
74
FeO
5.700
*1.000
Iron Oxide
75
FeS
4.840
*1.000
Iron Sulphide
76
Ga
5.930
0.593
Gallium
77
Ga
2
O
3
5.880
*1.000
Gallium Oxide (B)
78
GaAs
5.310
1.590
Gallium Arsenide
79
GaN
6.100
*1.000
Gallium Nitride
80
GaP
4.100
*1.000
Gallium Phosphide
81
GaSb
5.600
*1.000
Gallium Antimonide
82
Gd
7.890
0.670
Gadolinium
Table A-1 Material Table (continued)
Code
Formula
Density
Z-Ratio
Material Name