INFICON HAPSITE Smart Plus Chemical Identification System User Manual
Page 510
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16 - 12
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47
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HAPSITE Smart Plus Operating Manual
2
Install the 24 V Power electrical cap (P/N 070-1273). See
3
Install the EXT COM electrical cap (P/N 070-1273). See Figure 15-6.
Figure 16-6 24 V and EXT COM Caps
4
Install the yellow load lock cover (P/N 930-308-P1). See
.
Figure 16-7 Yellow Load Lock Cover
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