INFICON HAPSITE Smart Plus Chemical Identification System - Manual (Page 523)

16 - 25
IP
N 07
4-
47
2-
P1
C
HAPSITE Smart Plus Operating Manual
5 To loosen the chain clamp, turn the nut counter-clockwise until loose.
See
Figure 16-20
Figure 16-20 Loosening Chain Clamp
6 Remove chain clamp.
7 Pull the NEG Pump out.
NOTE: The aluminum gasket can not be reused. Bend the old gasket to avoid
possible reuse. Place the "USED" sticker, found in the new NEG Pump
Ship Kit, on the old NEG Pump. Follow the instructions provided with
the new NEG Pump to return the used NEG Pump.
8 Continue on to section 16.7.3, Part 2: Service Module Vacuum Interconnect
(VI) Valve Cleaning, on page 16-26 .