INFICON HAPSITE Smart Plus Chemical Identification System - Manual (Page 515)

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HAPSITE Smart Plus Operating Manual
16.6.1 NEG Pump Bakeout Procedure
A bakeout can be performed with or without the use of the Service Module. A
bakeout heats the NEG Pump to 700 degrees Centigrade for a specified length of
time (usually 2 hours). Refer to
section 2.8, Service Module, on page 2-19 for more
information on setting up the Service Module.
16.6.1.1 Bakeout Using the Laptop
For Service Module set up instructions, refer to
1 Click on the Service Module tab of the Properties menu.
2 Click on the Service button. See Figure 16-14 .
Figure 16-14 Service Button on the Service Module Tab